History of CMS and Atlas Pixel Detectors

CMS Pixels

CMS (D73,F),(D79,D80)

history:

970719 F with CrAu pixel pattern at CERN

971013 D73 with CrAu/AZ4620 pixel pattern at CERN

971015 PSI receives new CMS readout chips.

status:

971114 D73 to PSI with photoresist, bonding

971114 F to PSI with SiN, bonding

971127 D79,D80 with SiN to PSI bonding

980201 D79 back fron PSI, first bump bonding results

980301 D79 sent to OSU for new metallisation (Cr-Ni-Au)

ATLAS Pixels

LBL/Atlas (D73),(D79,D80)

history:

970806 back from cutting

970821 D73, 1st complete Ti/W metalization

970822 to LBL for inspection

970826 back from LBL

970902 D73, 2nd complete Ti/W metalization

970903 D73, to LBL for inspection

970905 D73, to Boeing for bump bonding

status:

971117 D73 LBL/RD42 Ru107 test at CERN,

LBL readout integration in LEPSI DAQ.

980424 first test beam results with D73

Marseille-Bonn/Atlas (F),(D79)

history:

970710 F back from cutting, then OSU

970719 F with CrAu pixel pattern at OSU

971013 decision not to use CrAu

971016 pixel pattern arrives from Marseille,

decide to use Ti/Ni/Au

971201 new Ni target arrived at OSU

971215 D79 1st metallization: Ti/Ni/Au

971220 D79 2nd metallization: Cr/Ni/Au

980106 F, D79 4th metallization: Cr/Ni/Au

980109 processing on F,D79

status:

980116 F,D79 contacts completed, awaiting passivation

980315 D79 arrived at CERN

980401 D79 goes back to OSU for new metallisation

980405 F arrives at CERN, will go to LETI for bumb bonding

980506 brought to LETI (Grenoble) for bump-bonding

980603 D79 arrived at CERN with a Ti-W metallisation

980617 practice piece D79 has been sent to Marseille (to Clemens)

980702 D73 (real detector) brought to LETI for bump bunding

980703 F sent to OSU

980825 tracker MB 73 and practice piece MB79 arrived at CERN

980826 tracker MB 73 and practice piece MB79 sent to LETI

Bonn-Marseille/Xray (D73), (D80)

history:

970915 D73 at OSU

971016 readout chips arrive at CERN

971105 chips arrive at OSU

971201 D80 complete Ti/W metallization (sputtering)

971202 D73 complete Ti/W metallization (sputtering)

980702 D73 now in use for Marseille Bonn

status:

to RD42 main page