FBK capabilities

CR detectors

  • Lithography
  • Diffusion and Implantation
  • Dry etching
  • Wet etching

CR MEMS

  • Lithography
  • Etching
  • Control Area

-- SotirisFragkiskos - 02-Sep-2011

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Topic revision: r1 - 2011-09-02 - SotirisFragkiskos
 
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