Cleanroom laboratory processing

• MiNaLab cleanroom laboratory,
• Reactive ion etch (RIE)
• Wafer bonding
• Functional materials (PZT)

Silicon radiation detectors

• Pad-, microstrip- and pixel detectors
• Drift Chambers
• Optical detectors
• Avalanche photo diodes
• 3D detectors

Micro electro-mechanical systems (MEMS)

• Pressure sensors
• Inertial sensors
• Micro acoustic devices
• Micro opto-electro-mechanical systems (MOEMS)
• Microfluidics and lab-on-a-chip

-- SotirisFragkiskos - 06-Sep-2011